Lecture 30: Cleanroom design and contamination control
design. Adapted from Microchip fabriion Peter van Zant. 7. The chase area is used for maintenance work on the process equipment. The drawback of this design is that it occupies a lot of space, since there must be a physical separation (wall) between the bay and chase. The current clean rooms go back to the ballroom design. The bay and chase areas are still de ned, but they are not ...